CMOS Hotplate Chemical Microsensors

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Markus Graf - CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS)
Springer | 2007 | ISBN: 3540695613 | 125 pages | PDF | 3.06 MB

This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers altogether aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, re>gularity design issues, and issues related to system and device microfabrication, packaging, and testing. A multifariousness of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and take the part of examples of the successful integration of nanomaterials, microtechnology and microelectronics.Download CMOS Hotplate Chemical Microsensors (Rapidshare):

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